MICROSTRUCTURE, METHOD FOR PRODUCING THE SAME, DEVICE FOR BONDING A MICROSTRUCTURE AND MICROSYSTEM

摘要

The invention relates to a microstructure comprising at least one bonding substrate and a reactive multilayer system, said reactive multilayer system having at least one surface layer of the bonding substrate with vertically aligned, interspaced nanostructures and regions between the nanostructures which are filled with at least one material that is a reaction partner for the material of the nanostructures. The invention further relates to a method of producing a microstructure comprising at least one bonding substrate and a reactive multilayer system, a surface layer of the bonding substrate being structured or deposited in a structured manner, thereby imparting to it vertically aligned, interspaced nanostructures and the regions between the nanostructures being filled with at least one material that is a reaction partner for the material of the nanostructures, to form the reactive multilayer system. The invention also relates to a device for bonding a microstructure, the device comprising a bonding chamber which can be opened and/or closed, and evacuated, and in which the microstructure and the further structure can be introduced and adjusted with respect to each other, and an activation mechanism coupled to the bonding chamber which mechanism is used to mechanically, electrically, electromagnetically, optically and/or thermally activate the reactive multilayer system of the microstructure in such a manner that a self-propagating, exothermal reaction takes place between the nanolayers, the multilayer system being formed by reactive nanostructures having an interposed material which is a reaction partner for the material of the nanostructures. The invention finally relates to a microsystem which is constituted of two bonding substrates and a structure lying between the bonding substrates. The structure comprises a reacted reactive layer system, the reacted reactive layer system being a reactive structure sequence of at least one surface layer provided on the bonding substrate, which surface layer has vertically aligned, interspaced nanostructures and regions between the nanostructures which are filled with at least one material that is a reaction partner for the material of the nanostructures. The microsystem is a sensor which is coated with a biological material, and/or has elements of a polymer material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.