发明名称 MOTOR CONTROL METHOD, MOTOR CONTROL DEVICE, AND MOTOR SYSTEM
摘要 <p>Provided is a motor control method that can rotate a motor to target coordinates in a short amount of time, even if the target coordinates are changed in small increments. The provided control method involves: obtaining the coordinates for the motor before starting rotation; obtaining a first pulse count, which is the number of pulses required to rotate the motor from the coordinates before starting rotation to the target coordinates; obtaining the cumulative number of pulses outputted since the motor began rotating and setting this number as a second pulse count; subtracting the second pulse count from the first pulse count to obtain a third pulse count, which is the number of pulses required to reach the target coordinates; obtaining a fourth pulse count, which is the number of pulses required for the motor to come to a stop from the current speed; and determining whether the motor should be sped up from its current speed, slowed down from its current speed, or maintained at a maximum speed in order to rotate the motor to the target coordinates on the basis of the third pulse count and the fourth pulse count.</p>
申请公布号 WO2011033940(A1) 申请公布日期 2011.03.24
申请号 WO2010JP65031 申请日期 2010.09.02
申请人 TOKYO ELECTRON LIMITED;ASHIDA MITSUTOSHI 发明人 ASHIDA MITSUTOSHI
分类号 H02P8/14 主分类号 H02P8/14
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