COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method capable of controlling deterioration of the film quality of a coating film containing an easily oxidizable metal.

SOLUTION: The coating method has an application step of applying a liquid material containing an easily oxidizable metal to a substrate and a heating step of heating the substrate applied with the liquid material under a reduced pressure lower than the atmospheric pressure.

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