DETECTING METHOD OF VACUUM ULTRAVIOLET RAY, AND SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a simple, convenient, and downsized integrated high-performance electron microscope in which function as a scanning electron microscope and function of detection of vacuum ultraviolet light emission are made compatible. SOLUTION: The scanning electron microscope includes: in addition to the scanning electron microscope having an electron beam source of a field emission method or a filament method; a low vacuum sample chamber to irradiate electrons while retaining a vacuum ultraviolet light-emitting material in a low vacuum atmosphere; a light condensing transmission part having a light condensing mirror to condense light including a vacuum ultraviolet ray emitted from the light-emitting material; and a spectrometer consisting of a spectroscope such as a diffraction grating in order to detect the vacuum ultraviolet ray and a detector such as a CCD and a photomultiplier. The light condensing transmission part transmits light including the vacuum ultraviolet ray condensed by the light condensing mirror directly to the spectrometer in an atmosphere such as nitrogen gas. The scanning electron microscope also has the function to detect an electron beam excited vacuum ultraviolet ray. COPYRIGHT: (C)2011,JPO&INPIT