发明名称 METHOD FOR MANUFACTURING TEMPLATE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a method for manufacturing a template for imprinting includes preparing a first template having a device pattern and a plurality of identification patterns, and forming a second template by transferring the device pattern and at lest desired one of the identification patterns to a template substrate.
申请公布号 US2011068083(A1) 申请公布日期 2011.03.24
申请号 US20100883935 申请日期 2010.09.16
申请人 KOBAYASHI YOSHIHITO 发明人 KOBAYASHI YOSHIHITO
分类号 B29C59/02 主分类号 B29C59/02
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