| 摘要 |
Provided is a substrate processing system, which comprises a substrate processing apparatus and a group management apparatus. The group management apparatus includes a communication part configured to communicate with the substrate processing apparatus, a first storage part configured to store data transmitted through the communication part from the substrate processing apparatus, a second storage part configured to store, when a predetermined abnormality is detected from at least the data, a file that prescribes an abnormality detection condition for detecting the abnormality, a display part including a manipulation screen configured to input a condition for detecting an abnormality by using the file or the data stored in the first storage part and/or the second storage part, and a screen control part configured to change, when an abnormality item for detecting an abnormality is selected from a plurality of abnormality items in the manipulation screen, the manipulation screen to a registration screen.
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