| 摘要 |
<p>An apparatus for the production of nanoparticles is disclosed, comprising a chamber, a magnetron located within the chamber and comprising a cylindrical target having at least an outer face of the material to be deposited and a hollow interior, a source of magnetic flux within the hollow interior arranged to present magnetic poles in a direction that is radially outward with respect to the cylindrical target, and a drive arrangement for imparting a relative motion in an axial direction to the target and the source of magnetic flux, the chamber having at least one aperture and being located within a volume of relatively lower gas pressure compared to the interior of the chamber. The chamber is preferably substantially cylindrical, and is ideally substantially co-axial with the target so as to offer a symmetrical arrangement. The motion of the target means that the erosion of its active surface is spread over a wider area, rather than being concentrated in local regions. This allows more efficient use of the target material. The motion of the target is preferably a reciprocating one. Generally, it is easier if the source of magnetic flux remains stationary and the target moves, but other arrangements are possible.</p> |
