| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conductive oxide capable of suppressing occurrence of nodule. <P>SOLUTION: The conductive oxide is a crystalline conductive oxide, and contains indium, gallium, zinc, oxygen and nitrogen while the concentration of nitrogen is ≥7×10<SP>19</SP>(atom/cc). The ratio of the concentration of indium to the total concentration of the concentration of indium, the concentration of gallium and the concentration of zinc is preferably ≥0.3 and ≤0.6. The conductive oxide is preferably used for a target of the sputtering method. <P>COPYRIGHT: (C)2011,JPO&INPIT |
