| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding member for eliminating the attaching/detaching work of a back plate in a film forming process, facilitating uniform raising of the temperature of the plane of a substrate, and permitting efficient chemical vapor deposition of thin films, and provide a method for manufacturing thin films. SOLUTION: By a recessed part 5, a sealing member 31 or the like, a substrate can be held in such a state that the surface adhering to the substrate adheres to substantially the entire surface of one surface of a glass substrate 20. There is provided a substrate holding member 1 that can be introduced into a chemical vapor deposition chamber by a travel device in the state of holding the glass substrate 20 and is formed by a carbon-fiber reinforced carbon complex. COPYRIGHT: (C)2011,JPO&INPIT
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