| 摘要 |
PROBLEM TO BE SOLVED: To compensate for temperature characteristics in, e.g, a form of a resin mold, and to prevent the deterioration of characteristics during moisture absorption. SOLUTION: A laminated body 7 is provided that includes: electrodes 2 formed on a piezoelectric substrate 1; a first SiO<SB>2</SB>layer 3 formed on the piezoelectric substrate 1 so as to cover the electrodes 2; a SiN layer 4 formed on the first SiO<SB>2</SB>layer 3; and a second SiO<SB>2</SB>layer 5 formed on the SiN layer 4. The piezoelectric substrate 1 is formed of, e.g., LiTaO<SB>3</SB>. The electrodes 2 are, for example, comb electrodes formed of aluminum (Al). COPYRIGHT: (C)2011,JPO&INPIT
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