| 摘要 |
PROBLEM TO BE SOLVED: To facilitate making a sample for atom probe observation. SOLUTION: A thin-film sample 2 thinned down to allow for observation by a transmission type electron microscope is made from a model alloy 1 to be observed, and a mark 3 is manufactured on the thin-film sample 2. Then, on the upper surface of the thin-film sample 2 positioned near the mark 3 where ultrahigh-voltage electron rays are applied with an area near the mark 3 as an irradiation part, there is formed a protective film 4. Then, the protective film 4 and the thin-film sample 2 located on a lower surface of the protective film 4 are set to be samples 5 to be sampled that are to be sampled for performing an analysis using the three-dimensional atom probe, thus making the sample for atom probe observation. COPYRIGHT: (C)2011,JPO&INPIT |
