MASK CLEANING APPARATUS FOR ORGANIC EL, APPARATUS FOR MANUFACTURING ORGANIC EL DISPLAY, ORGANIC EL DISPLAY, AND MASK CLEANING METHOD FOR ORGANIC EL

摘要

PROBLEM TO BE SOLVED: To clean vapor deposition substances sticking on a tapered surface formed in an opening part of a mask for organic EL with a high degree of cleaning. SOLUTION: A mask cleaning apparatus for organic EL is used for performing cleaning of a mask 1 for organic EL, which has a plurality of opening parts 3 each having tapered surfaces 5A to 5D. The mask cleaning apparatus includes: a first laser optical system 17 for making a first laser L1 incident on adjacent two tapered surfaces of four tapered surfaces 5A to 5D formed in each opening part 3 from an opposite side across the diagonal line D1 of the opening part 3 and scanning the first laser light L1 in an oblique direction of the opening part 3; and a first laser moving part 24A for relatively moving the mask 1 for organic EL and the first optical laser system 17A so that the first laser L1 is made incident from an opposite side of the two tapered surfaces across the diagonal line D1. COPYRIGHT: (C)2011,JPO&INPIT