VAPOR DEPOSITION MASK AND METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition mask in which strain is hardly generated. SOLUTION: Two or more opening parts 42 are arranged in such a manner that a pair of first sides 44 coincide with the sides of both sides of a plurality of first strip-shaped regions 52 extending in a first direction D11and standing in line in a second direction D22and that the intervals I1between adjacent opening parts 42 each become equal to the width W1 in the first direction D11of each opening part 42 in each first strip-shaped region 52. A plurality of opening parts 42 are arranged in such a manner that a pair of second sides 46 coincide with the sides of both sides of a plurality of second strip-shaped regions 56 extending in the second direction D22and standing in line in the first direction D11and that the intervals I2between adjacent opening parts 42 each become twice the length L in the second direction D22of the opening part 42 in each second strip-shaped region 56. Rib parts 54 each having a width W2 being 0.5 times the length L in the second direction D22of the opening part 42 and having a length in the first direction D11are formed between a pair of first strip-shaped regions 52 adjacent to each other in the second direction D22. COPYRIGHT: (C)2011,JPO&INPIT