DEVICE FOR HEATING OR COOLING WORKPIECE, WORKPIECE STORING MEANS AND REFLOW SOLDERING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device capable of uniformly heating or cooling a workpiece. SOLUTION: The device for heating or cooling the workpiece at least includes a treatment container defining a storage space for storing the workpiece and a temperature control means for controlling the temperature of gas in the storage space. The treatment container includes: a heat insulating outer layer; and a heat uniformizing layer having 100 W/mK or more of thermal conductivity and arranged on the inner side from the outer layer for uniformizing temperature distribution in the storage space. COPYRIGHT: (C)2011,JPO&INPIT