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发明名称
Verfahren zur Herstellung eines Halbleiterbauelements
摘要
申请公布号
DE10205323(B4)
申请公布日期
2011.03.24
申请号
DE20021005323
申请日期
2002.02.08
申请人
FUJI ELECTRIC SYSTEMS CO. LTD.
发明人
OTSUKI, MASAHITO;MOMOTA, SEIJI;KIRISAWA, MITSUAKI;YOSHIMURA, TAKASHI
分类号
H01L21/331;H01L29/739
主分类号
H01L21/331
代理机构
代理人
主权项
地址
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