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发明名称
Oxidation nach Oxidauflösung
摘要
申请公布号
DE112008003726(T5)
申请公布日期
2011.03.24
申请号
DE200811003726T
申请日期
2008.02.20
申请人
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
KONONCHUK, OLEG;CELLER, GEORGE K.
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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