发明名称 LINEAR MOTOR AND POSITION DETECTING METHOD OF LINEAR MOTOR
摘要 <P>PROBLEM TO BE SOLVED: To solve the following problem of a position detecting method of a linear motor: when a magnetic sensor is installed near a drive coil of the magnetic sensor, the accuracy in position detection is reduced owing to an influence of a magnetic field generated when power is supplied to the drive coil. <P>SOLUTION: The linear motor includes: a magnet in which a magnetic pattern for driving is magnetized along a linear drive direction, a drive coil which is arranged to face the magnet and generates a drive force in the drive direction against the magnet, and a plurality of magnetic sensors which are arranged to face each other on the side opposite to the drive coil against the magnet. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011061995(A) 申请公布日期 2011.03.24
申请号 JP20090209752 申请日期 2009.09.10
申请人 NIKON CORP 发明人 TANAKA TOSHIHISA;YAMAMOTO YOICHI
分类号 H02K41/03;H02K11/00 主分类号 H02K41/03
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