| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprint apparatus which determines whether a formed pattern is good or bad. <P>SOLUTION: The imprint apparatus performs imprint operations including formation by molding a resin applied to a substrate for every imprint region of the substrate one by one, to form patterns on the imprint regions sequentially. The imprint apparatus includes a photography section for taking a photograph of the resin formed by the imprint operation, and a control unit. The control unit obtains information for specifying a partial region in the imprint region where a variation in color of an image taken by the photography section shall be smaller than a predetermined threshold or less, to obtain the variation in color in the partial region of the image taken by the photography section. If the obtained variation is larger than the threshold, the control unit determines that the formed pattern is bad, and executes an error management process. <P>COPYRIGHT: (C)2011,JPO&INPIT |
