发明名称 |
FILM FORMATION METHOD AND FILM FORMATION APPARATUS |
摘要 |
A film formation method according to the present invention includes the step of forming a film of material powders 7 by introducing a carrier gas 5 to a first chamber 8 accommodating the material powders 7 intermittently and mixing the material powders 7 and the carrier gas 5 to generate a first aerosol, introducing the first aerosol to a second chamber 9 to generate a second aerosol, and jetting the second aerosol to a third chamber 13 to form a film of the material powders 7.
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申请公布号 |
US2011070359(A1) |
申请公布日期 |
2011.03.24 |
申请号 |
US20080673907 |
申请日期 |
2008.07.22 |
申请人 |
TAKAHASHI KEIICHI;MINO SHINJI;YOSHIDA TSUNENORI |
发明人 |
TAKAHASHI KEIICHI;MINO SHINJI;YOSHIDA TSUNENORI |
分类号 |
C23C16/52;B05C19/04 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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