发明名称 OPTICAL ILLUMINATION APPARATUS AND METHOD
摘要 An optical system for detecting light from a 2D area of a sample (36) comprises a collection lens (34) for collecting light from a collection region of the sample. A light detector (44) is positionally fixed with respect to the sample, and a reflector arrangement (61) directs collected light to the detector. The reflector arrangement comprises movable components and the collection lens (34) is movable relative to the sample. The collection lens and the movable components are configurable to define different collection regions, and the movement of the components effects a direction of the light from the collection region to a substantially unchanged area of the light detector (44). This arrangement avoids the need for a bulky detector in order to detect signals from a 2D sample area formed by scanning across the sample.
申请公布号 US2011068260(A1) 申请公布日期 2011.03.24
申请号 US20090992608 申请日期 2009.05.18
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 VAN DIJK ERIK MARTINUS HUBERTUS PETRUS;HEZEMANS CORNELIUS ANTONIUS
分类号 H01J40/14;G01N21/64;G02B21/00 主分类号 H01J40/14
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