| 摘要 |
PROBLEM TO BE SOLVED: To improve convenience of a defect review device or an inspection system user by shortening the time required to create a report on defect review. SOLUTION: A defect review support device 13 used while being connected to the defect review device having a review function for a plurality of defects present in a sample to be inspected includes: an arithmetic means configured to process positional information and image information on defects taken in through an outward appearance inspection device 3 etc.; and a monitor configured to display an operation picture for creating a review report on the summary of results of defect review, and review report generation tools 10 to 12 are provided, which have a layout editing function for the review report. COPYRIGHT: (C)2011,JPO&INPIT |
