| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film removal device with an inspection function that has neither an increase in the length of a solar cell film production line nor an increase in occupation area resulting from inspection of a film removal state of each layer even when the inspection is performed, and eliminates the need for a time of only an inspection time, by integrating a film removal device and an inspection device; and to provide a film removal device with an inspection function that can detect a defect in processing etc., caused in a film removal step of each layer or between films, or a solar cell film production line or solar cell film production method with high reliability. <P>SOLUTION: The present invention is characterized in that when a scribe is formed by removing a portion of a film forming a layer constituting a solar cell film, by irradiating the film with a laser beam and a scribe state is inspected, at least the scribed is imaged while removing the portion of the film to inspect the scribe state. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
