| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gray tone mask capable of improving a pattern shape and pattern accuracy. <P>SOLUTION: The method of manufacturing the gray tone mask including a light shielding part 1, a light transmitting part 2 and a gray tone part 3 includes: a process of preparing a mask blank for which at least a semi-light transmitting film, an etching stopper film and a light shielding film are successively formed on a transparent substrate and a resist film is formed; a process of exposing the resist film by exposure for completely exposing resist to a part forming the light transmitting part and by the exposure less than the exposure for completely exposing the resist to a part forming a gray tone part; a process of performing development processing and forming such a resist pattern that a residual film value is different between the light shielding part and the gray tone part; a process of etching the light shielding film exposed in a region where the resist is removed; a process of simultaneously removing the semi-light transmitting film on the part to form the light transmitting part and the light shielding film on the part to form a semi-light transmitting part; and a process of removing the resist film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
