| 摘要 |
PROBLEM TO BE SOLVED: To achieve a high resolution by high-precision interference, while miniaturizing an interferometer and a spectroscope compact, by adopting a structure enabling connection of rigid bodies 33 and 34 and leaf springs 31 and 32 without using an adhesive. SOLUTION: Leaf springs 31 and 32 are disposed oppositely and have respectively flat plates 31p and 32p which are opposed through a space between the rigid bodies 33 and 34 disposed separately from each other. The rigid bodies 33 and 34 are thicker than the individual flat plates 31p and 32p, so that the rigid body 33 can be displaced greatly in relation to the fixed rigid body 34, upon flexural deformation of the leaf springs 31 by a drive unit 35. Besides, the rigid bodies 33 and 34 are formed of glass or silicon, so that the use of a method for connection without the adhesive is enabled for connecting the rigid bodies 33 and 34 with the leaf springs 31 and 32. Thereby a manufacturing error due to the adhesive can be eliminated and installation of a corner cube in the usual practice is dispensed with in the interferometer and the spectroscope. COPYRIGHT: (C)2011,JPO&INPIT |
