| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device suppressing deterioration of a device working rate resulting from performing a wafer recovery work or the like by performing retry processing even if predetermined processing stops due to a failure. SOLUTION: The substrate processing device includes a conveyance means conveying a wafer 1 and a control means controlling the conveyance means. When the conveyance means is stopped temporarily due to the occurrence of an error in conveying the substrate, the control means causes the conveyance means to shift to a standby state (command input waiting state) in a case where the error is not resolved even if the control means causes the conveyance means to perform the retry processing a predetermined number of times. COPYRIGHT: (C)2011,JPO&INPIT
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