| 摘要 |
PROBLEM TO BE SOLVED: To enable correction of displacement of a gantry or its coating head. SOLUTION: The coating heads 5La-5Lc, 5Ra-5Rc are movably installed in a Y axis direction to the respective gantries 3L, 3R movably installed in an X axis direction in the state of straddling a substrate placing stand 8 on a base 1. Glass substrates 10a-10b for trial run are installed respectively at the gantries 3L-3R sides of the substrate placing stand 8, paste marks are drawn on the glass substrates 10a-10b for trial run with the coating heads 5La-5Lc, 5Ra-5Rc of the gantries 3L, 3R, and on the basis of these positions, the displacement of X and Y axial directions between the coating heads 5La-5Lc and the coating heads 5Ra-5Rc is detected. Then, a reference position mark 9 is formed in the center of the substrate placing stand 8, and by detecting the travel distance of the gantries 3L-3R to the reference position mark 9, the displacement of these gantries 3L-3R in an X axis direction can be detected. COPYRIGHT: (C)2011,JPO&INPIT
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