发明名称 CURABLE COMPOSITION FOR IMPRINT, CURED PRODUCT AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a curable compound for imprint with low-viscosity and low volatile. SOLUTION: The curable compound for imprint contains≥30 wt.% of a (meth)acrylate compound based on the whole polymeric monomer, wherein the (meth)acrylate compound is composed of only a carbon atom, an oxygen atom and a hydrogen atom and has≥310 of a molecular weight and≤30 Pa s of viscosity at 25°C. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011060818(A) 申请公布日期 2011.03.24
申请号 JP20090205713 申请日期 2009.09.07
申请人 FUJIFILM CORP 发明人 SAKIDA KYOHEI;FUJITA AKINORI;YONEZAWA HIROYUKI
分类号 H01L21/027;B29C59/02;C08F20/10 主分类号 H01L21/027
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