发明名称 |
CURABLE COMPOSITION FOR IMPRINT, CURED PRODUCT AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a curable compound for imprint with low-viscosity and low volatile. SOLUTION: The curable compound for imprint contains≥30 wt.% of a (meth)acrylate compound based on the whole polymeric monomer, wherein the (meth)acrylate compound is composed of only a carbon atom, an oxygen atom and a hydrogen atom and has≥310 of a molecular weight and≤30 Pa s of viscosity at 25°C. COPYRIGHT: (C)2011,JPO&INPIT
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申请公布号 |
JP2011060818(A) |
申请公布日期 |
2011.03.24 |
申请号 |
JP20090205713 |
申请日期 |
2009.09.07 |
申请人 |
FUJIFILM CORP |
发明人 |
SAKIDA KYOHEI;FUJITA AKINORI;YONEZAWA HIROYUKI |
分类号 |
H01L21/027;B29C59/02;C08F20/10 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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地址 |
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