发明名称 SEMICONDUCTOR STORAGE DEVICE COMPRISING DOT-TYPE CHARGE ACCUMULATION PORTION AND CONTROL GATE, AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor memory device includes a first insulation film, Charge accumulation portions, a second insulation film, and a control gate. The first insulation film is located on an active area (AA). The charge accumulation portions comprise minute crystals arranged on the first insulation film. A density of the charge accumulation portions at an end portion in an AA width direction of the first insulation film is higher than a density of the charge accumulation portions at a central potion in the AA width direction. The second insulation film is located on the first insulation film so as to coat the charge accumulation portions. The control gate is located on the second insulation film.
申请公布号 US2011069553(A1) 申请公布日期 2011.03.24
申请号 US20100727780 申请日期 2010.03.19
申请人 SAWAMURA KENJI 发明人 SAWAMURA KENJI
分类号 G11C16/04;H01L21/336;H01L29/792 主分类号 G11C16/04
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