| 摘要 |
According to one embodiment, a semiconductor device includes a semiconductor substrate, a drain layer provided thereon, a first body layer provided thereon, source layers and a gate electrode buried in each of a plurality of trenches. The source layers are discretely arranged in a staggered pattern on a surface of the first body layer in a first direction and in a second direction orthogonal to the first direction. The trenches extend in a third direction on the surface of the first body layer, are arranged in a fourth direction orthogonal to the third direction, and pierce through the source layer and the first body layer into the drain layer. The gate electrode is buried in each of the trenches via a gate insulating film. Sum of the width of the source layer and the spacing between the source layer and the adjacent source layer is smaller than spacing between the adjacent trenches.
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