发明名称 VACUUM DEPOSITION APPARATUS AND METHOD OF PRODUCING VAPOR-DEPOSITED FILM
摘要 This invention relates to a vacuum vapor-deposition apparatus for forming vapor-deposited films on a base film, thereby to produce vapor-deposited films, and also to a method of producing vapor-deposited films. In the vacuum vapor-deposition apparatus, the synchronizing means (18) equalizes the circumference velocity v1 of the coating roll (14) and the circumference velocity v2 of the takeup guide roll (15). Hence, v1 = v2. Therefore, the takeup guide roll (15) never rubs the vapor-deposited layer provided on the surface of the film. This eliminates the possibility that the vapor-deposited layer has scratches. The vapor-deposited layer can therefore possess desired properties. <IMAGE>
申请公布号 EP1593754(A4) 申请公布日期 2011.03.23
申请号 EP20030782915 申请日期 2003.12.26
申请人 TOPPAN PRINTING CO., LTD.;APPLIED MATERIALS GMBH & CO. KG 发明人 SASAKI, NOBORU;SUZUKI, HIROSHI;KOIZUMI, FUMITAKE;IMAI, NOBUHIKO;ARAI, KUNIMASA;KONAGAI, HIROYUKI
分类号 C23C14/56 主分类号 C23C14/56
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