SUBSTRATE-CUTTING SYSTEM, SUBSTRATE-PRODUCING APPARATUS, SUBSTRATE-SCRIBING METHOD, AND SUBSTRATE-CUTTING METHOD

摘要

A clamping device ( 50 ) is installed on a stand ( 10 ) with a hollow rectangular parallelepiped shape such that at least one place at a side edge portion of a mother board transported in the stand ( 10 ) is clamped. A pair of substrate-cutting devices for cutting the mother substrate, clamped by the clamping device ( 50 ), from its upper face and lower face is provided on a scribing device guide body ( 30 ). The scribing device guide body ( 30 ) is reciprocally movable along one side of the hollow rectangular parallelepiped. The pair of substrate-cutting devices is installed so as to be movable along the direction perpendicular to the movement direction of the scribing device guide body ( 30 ). The mother substrate clamped by the clamping device is supported by a substrate-supporting device ( 20 ).