SILICON CARBIDE DIMPLED SUBSTRATE

摘要

A substrate is disclosed. It comprises:
a first layer having a first main surface and a second main surface opposing the first main surface;
an active layer on the first main surface of the first layer;
an array of dimples extending from the second main surface into the first layer toward the first main surface; and
a metallization layer overlying the second main surface of the first layer and within the dimples.