Method of manufacturing a bulk acoustic wave device

摘要

A method of manufacturing a Bulk Acoustic Wave device. The method comprises: providing an active layer formed of an electro-mechanical transducer material; providing a first electrode on the active layer, defining a first electrode portion of the device, whereby a remaining portion of the device is defined around the first electrode; providing a stop-layer on the first electrode; depositing a first dielectric layer on the resultant structure; and planarizing the first dielectric layer until the stop-layer on the first electrode is exposed.