发明名称 |
Method of making durable articles |
摘要 |
Optical articles of zinc sulfide and zinc selenide with thick coatings of alumina are disclosed. The alumina coatings are deposited on the zinc sulfide and zinc selenide by a microwave assisted magnetron sputtering. In addition to alumina coatings, the optical articles may also include various polymer coatings. |
申请公布号 |
EP2298953(A2) |
申请公布日期 |
2011.03.23 |
申请号 |
EP20100177465 |
申请日期 |
2010.09.17 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, LLC |
发明人 |
GOELA, JITENDRA S.;STERN, HEATHER A.G |
分类号 |
C23C14/08;C23C14/35 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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