| 摘要 |
<p>A method for manufacturing a magnetic sensor. The method includes forming a plurality of magnetic detection elements (10, 20, 30, 40) on a substrate (2) to form a bridge circuit, forming a protective film (6) that protects the magnetic detection elements on the substrate, forming a plurality of stress absorption grooves (7) near each of the magnetic detection elements by etching the protective film to produce a multilayer substrate (11) including the protective film, the stress absorption grooves, and the magnetic detection elements, packaging the multilayer substrate, and annealing the multilayer substrate prior to the packaging,</p> |
