| 摘要 |
Disclosed are a transport apparatus that holds and transports an object on a predetermined transport track using a transport portion provided at the leading end of an arm and is capable of acquiring the teaching information of a transport position using a normal transport operation, a position teaching method, and a sensor jig. A transmissive sensor (32) is provided in a sensor jig (30) such that the projection segments of an optical axis (41) and an optical axis (42) on a projection plane intersect with each other and neither the project segment of the optical axis (41) nor the projection segment of the optical axis (42) is aligned with the X-direction and the Y-direction. During a position teaching operation, the sensor jig (30) is provided so as to be held by a wafer transport portion (24), thereby detecting target members (51, 52). |
