发明名称
摘要 The arrangement has a layer stack (26) arranged between a conductive chemical lead (22) and a dielectric. An intermediate layer has specific electrical resistance greater than resistance of conductive layers (52), and electrically conducting layers with a layer thickness of 5-60 Angstrom. The layers have a material, and the specific electrical resistance of the layers is smaller than that of the intermediate layers (54). An independent claim is also included for a method for electrolytic deposition of a copper conducting structure.
申请公布号 JP4658857(B2) 申请公布日期 2011.03.23
申请号 JP20060140101 申请日期 2006.05.19
申请人 发明人
分类号 H01L21/768;H01L21/28;H01L21/285;H01L23/522 主分类号 H01L21/768
代理机构 代理人
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