PURPOSE: An apparatus for manufacturing a substrate is provided to solve the problems related to the restriction in the number or arrangement of plural processing chambers and properly adjust the increase rates of conveyance chambers and the processing chambers resulting from the increase of the area of a substrate. CONSTITUTION: An apparatus for manufacturing a substrate comprises: a conveyance chamber(240) which is extended in one direction; plural processing chambers and load lock chambers which are connected to the lateral direction of the conveyance chamber along the long shaft of the conveyance chamber; a substrate storage unit which loads a substrate(100); and a substrate acceptance unit which is connected between the substrate storage unit and the load lock chamber to convey the substrate through the rotation of the substrate.
