发明名称 |
Thin-film solar cell manufacturing apparatus |
摘要 |
<p>A thin-film solar cell manufacturing apparatus includes a film forming chamber that is evacuated to a reduced pressure and forms a film on a substrate using a CVD method; a loading-ejecting chamber that is connected to the film forming chamber via a first opening-closing part and that is switchable between atmospheric pressure and reduced pressure; transfer rail that is laid at the film forming chamber and the loading-ejecting chamber; a carrier that holds the substrate and moves along the transfer rail; and a carrier transfer mechanism that transfers the carrier, wherein, the carrier transfer mechanism is provided in the loading-ejecting chamber to transfer the carrier between the film forming chamber and the loading-ejecting chamber.</p> |
申请公布号 |
EP2299498(A1) |
申请公布日期 |
2011.03.23 |
申请号 |
EP20090758344 |
申请日期 |
2009.06.03 |
申请人 |
ULVAC, INC. |
发明人 |
SHIMIZU YASUO;OGATA HIDEYUKI;MATSUMOTO KOICHI;NOGUCHI TAKAFUMI;WAKAMORI JOUJI;OKAYAMA SATOHIRO;MORIOKA YAWARA;SUGIYAMA NORIYASU;SHIGETA TAKASHI;KURIHARA HIROYUKI |
分类号 |
H01L21/677;C23C16/458;H01L31/18 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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