MICROSTRUCTURE, AND METHOD FOR PRODUCTION THEREOF

摘要

A microstructure which has excellent long-term stability and is capable of simple joining by thermocompression bonding at a high joint strength is provided. The microstructure includes an insulating base in which through micropores with a pore size of 10 to 500 nm are disposed at a density of 1 × 10 6 to 1 × 10 10 micropores/mm 2 . The through micropores are filled with a metal at a filling ratio of at least 30% and a polymer layer is formed on at least one surface of the insulating base.