发明名称
摘要 A method for forming a pattern and a method for fabricating an LCD device using the same is disclosed, wherein a photoresist layer is removed from a substrate without using a photoresist stripper, so that the pattern is formed with a low fabrication costs. The method comprising sequentially forming a pattern material layer, a transformed material layer and a photoresist layer on a substrate; patterning the photoresist layer by exposure and development using a mask; selectively etching the transformed material layer and the pattern material layer by using the patterned photoresist layer as a mask; and removing the transformed material layer and the patterned photoresist layer in a lift-off method by applying light.
申请公布号 JP4658029(B2) 申请公布日期 2011.03.23
申请号 JP20060342588 申请日期 2006.12.20
申请人 发明人
分类号 G02F1/13;G02F1/1335;G02F1/1368 主分类号 G02F1/13
代理机构 代理人
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