| 摘要 |
<p>PURPOSE: A template with the identification mark and a manufacturing method thereof are provided to exclude the effect by the mark formed by the additional process by forming the pattern on a substrate using the light imprint method with the template processed with the identifiable mark. CONSTITUTION: The surface of a substrate(11) is distinguished into a main pattern area(12) for forming the desired pattern and a peripheral area(13) surrounding the main pattern area. The desired pattern is formed in the concavo-convex shape on the main pattern area. A part of the peripheral area is etched. A unique identification mark is formed on the other side of the substrate in order to identify the kind and the history of the template.</p> |
