发明名称 Source for providing an electron beam of settable power
摘要 The invention concerns a source supplying an adjustable energy electron beam, comprising a plasma chamber (P) consisting of an enclosure (1) having an inner surface of a first value (S1) and an extraction gate (2) having a surface of a second value (S2), the gate potential being different from that of the enclosure and adjustable. The invention is characterized in that the plasma is excited and confined in multipolar or multidipolar magnetic structures, the ratio of the second value (S2) over the first value (S1) being close to: D=1/&bgr; √2&pgr;me/mi exp (−½), wherein: &bgr; is the proportion of electrons of the plasma P, me the electron mass, and mi is the mass of positively charged ions.
申请公布号 US7911120(B2) 申请公布日期 2011.03.22
申请号 US20040497894 申请日期 2004.11.18
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE 发明人 LACOSTE ANA;PELLETIER JACQUES;ARNAL YVES ALBAN-MARIE
分类号 H01J7/24;H05H1/46;H01J3/02;H01J37/077 主分类号 H01J7/24
代理机构 代理人
主权项
地址