发明名称 Method for manufacturing high temperature superconducting conductor
摘要 A method for manufacturing a high-temperature superconducting conductor includes translating an elongated substrate through a reactor. Further, a high temperature superconducting layer is formed on the substrate translating through the reactor by deposition of a reaction product of metalorganic precursor materials onto the substrate. Further, partial pressure of oxygen is monitored to indirectly monitor supply of metalorganic precursors into the reactor.
申请公布号 US7910155(B2) 申请公布日期 2011.03.22
申请号 US20060326895 申请日期 2006.01.06
申请人 SUPERPOWER, INC. 发明人 LEE HEE-GYOUN;SELVAMANICKAM VENKAT
分类号 B05D5/12;C23C14/00;C23C16/00;C23C16/40;C23C16/448;C23C16/54;H01L39/24 主分类号 B05D5/12
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