发明名称 |
Calibration of high speed loader to substrate transport system |
摘要 |
In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
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申请公布号 |
US7912576(B2) |
申请公布日期 |
2011.03.22 |
申请号 |
US20080245738 |
申请日期 |
2008.10.04 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE MICHAEL R.;ENGLHARDT ERIC A.;LOWRANCE ROBERT B.;ELLIOTT MARTIN R.;HUDGENS JEFFREY C.;VAN KATWYK KIRK;PURI AMIT |
分类号 |
G06F7/00;H01L21/68;B65G49/05;B65G49/06;B65G49/07;H01L21/00;H01L21/677 |
主分类号 |
G06F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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