| 摘要 |
A first protective layer is formed on the surface of a photoelectric conversion substrate on which photoelectric transducers have been provided, and then, a scintillator layer is formed thereon, whereby degradation of the photoelectric transducers due to the contact with the scintillator layer is prevented. A second protective layer covering the surface of the scintillator is formed. A peripheral part of the first protective layer is allowed to be in close contact with a peripheral part of the second protective layer to seal the scintillator layer between the first protective layer and the second protective layer, whereby degradation of the scintillator layer due to the moisture in the atmospheric air is prevented.
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