发明名称 Structure and fabrication method for capacitors integratible with vertical replacement gate transistors
摘要 A process and an architecture related to a vertical MOSFET device and a capacitor for use in integrated circuits. Generally, the integrated circuit structure includes a semiconductor layer with a major surface formed along a plane thereof and further including a first doped region formed in the surface. A second doped region of a different conductivity type than the first doped region is positioned over the first region. A third doped region of a different conductivity type than the second region is positioned over the second region. In one embodiment of the invention, a semiconductor device includes a first layer of semiconductor material and a first field-effect transistor having a first source/drain region formed in the first layer. A channel region of the transistor is formed over the first layer and an associated second source/drain region is formed over the channel region. The integrated circuit further includes a capacitor having a bottom plate, dielectric layer and a top capacitor plate. In an associated method of manufacture, a first device region, selected from the group consisting of the source region and a drain region of a field-effect transistor is formed on a semiconductor layer. A first field-effect transistor gate region is formed over the first device region. A capacitor comprising top and bottom layers with a dielectric layer disposed therebetween, is also formed on the semiconductor layer. In another embodiment, the capacitor layers are formed within a trench or window formed in the semiconductor layer.
申请公布号 US7911006(B2) 申请公布日期 2011.03.22
申请号 US20090610733 申请日期 2009.11.02
申请人 AGERE SYSTEMS INC. 发明人 CHAUDHRY SAMIR;LAYMAN PAUL ARTHUR;MCMACKEN JOHN RUSSELL;THOMSON J. ROSS;ZHAO JACK QINGSHENG
分类号 H01L27/04;H01L29/78;H01L21/334;H01L21/336;H01L21/822;H01L21/8234;H01L27/06;H01L27/088 主分类号 H01L27/04
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