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发明名称
SEQUENTIAL SPUTTERING APPARATUS
摘要
申请公布号
GB1241213(A)
申请公布日期
1971.08.04
申请号
GB19680047925
申请日期
1968.10.09
申请人
VARIAN ASSOCIATES
发明人
LAWRENCE FRANCIS HERTE;FRANK RUDOLPH KLOSS
分类号
C23C14/35;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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