发明名称 SAPPHIRE SUBSTRATE (VERSIONS)
摘要 FIELD: machine building. ^ SUBSTANCE: here is disclosed sapphire substrate with flat surface and crystallographic orientation chosen from group including orientation in a-plane, r-plane, m-plane and c-plane. Also, this substrate has nTTV approximately not over 0.037 mcm/cm2, nTTV corresponds to change of total thickness normalised relative to area of flat surface. The substrate has approximate diametre not less, than 9.0 cm. ^ EFFECT: production of substrates of high quality with large surface areas. ^ 15 cl, 6 tbl, 5 dwg
申请公布号 RU2414550(C1) 申请公布日期 2011.03.20
申请号 RU20090128751 申请日期 2007.12.21
申请人 SEHNT-GOBEHN KERAMIKS EHND PLASTIKS, INK. 发明人 TANIKELLA BRAKHMANANDAM V.;SIMPSON MEHT'JU A.;CHINNAKARUPPAN PALANIAPPAN;RIZZUTO ROBERT A.;CHERIAN ISAAK K.;VEDANTAM RAMANUDZHAM
分类号 C30B29/20;H01L31/036 主分类号 C30B29/20
代理机构 代理人
主权项
地址