| 摘要 |
PROBLEM TO BE SOLVED: To prevent corrosion of a pump for discharging gas after a sterilizing treatment, and to reliably discharge the gas after the sterilizing treatment. SOLUTION: A first treatment for supplying air to a main chamber 11 via a sub-chamber 12 from an air intake system 20 with a vacuum pump P52 stopped and a second treatment for bringing the gas after the sterilizing treatment in the main chamber 11 into an exhaust part 53 and discharging the gas by a chemical-resistant pump P51 with the vacuum pump P52 stopped are repeated for prescribed cycles. After the end of a treatment by a first control part 72, the vacuum pump P52 is activated to bring the gas after the sterilizing treatment in the main chamber 11 into the exhaust part 53, and rapidly discharges the gas. COPYRIGHT: (C)2011,JPO&INPIT
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